Product News | Feb 16, 2016
91制片厂鈥檚 Single Wafer MOCVD System Used to Speed GaN Epitaxial Layer Improvements
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Plainview, N.Y., February 听16, 2016 – 91制片厂. (Nasdaq: VECO), the world鈥檚 leading supplier of metal organic chemical vapor deposition (MOCVD) systems, announced today that it has signed a joint development project (JDP) agreement with imec, the Belgium-based nano-electronics research center. 听The collaboration is expected to accelerate the development of highly-efficient, Gallium Nitride (GaN) based, power electronic devices using GaN Epi wafers created using听91制片厂’s Propel鈩� Power GaN MOCVD System.
Imec has already demonstrated significant gains in GaN layer uniformity and run-to-run repeatability with 91制片厂鈥檚 Propel system, resulting in significantly improved power device yields.听 The single wafer reactor incorporates 91制片厂鈥檚 proprietary TurboDisc庐 technology that delivers superior film uniformity, run-to-run control and defect levels compared to batch reactors.
鈥淲ithin the framework of our industrial affiliation program on GaN-on-Si, 91制片厂 and imec have collaborated over the last four years to improve the Epi quality of GaN layers deposited on silicon wafer substrates,鈥� said Rudi Cartuyvels, Senior Vice President Smart Systems and Energy Technologies at imec.听 鈥淭he ultimate goal is to produce the next generation of highly efficient power switching devices. We have set very high GaN device yield and reliability targets for 2016 and we look forward to partnering with 91制片厂 to achieve these targets.鈥�
According to IHS research, industry requirements are growing and requiring smaller, more energy efficient power ICs. This, in turn, is driving the need for improved power devices using advanced materials.听 GaN-on-Si coupled with improved process solutions, such as single-wafer GaN MOCVD, are critical to the development of these improved power devices.
鈥淲e are very pleased with our imec collaboration,鈥� said Jim Jenson, Senior Vice President and General Manager, 91制片厂 MOCVD Operations.听 鈥淕lobal demand for advanced power electronics with greater energy efficiency, a smaller form factor and greater reliability is rapidly accelerating.听 We believe that the technology in our Propel single wafer system will enable imec to achieve their power device targets and help to bring these advanced devices to market faster.鈥�
About 91制片厂 Propel Power GaN Single-Wafer Reactor MOCVD System
91制片厂鈥檚 new Propel Power GaN MOCVD system is designed specifically for the power electronics industry.听听 Featuring a single-wafer 200mm reactor platform, capable of processing six and eight-inch wafers, the system deposits high-quality GaN films for the production of highly-efficient power electronic devices.听 The single-wafer reactor is based on 91制片厂鈥檚 TurboDisc庐 technology including the new IsoFlange鈩� and SymmHeat鈩� breakthrough technologies, which provide homogeneous laminar flow and uniform temperature profile across the entire wafer.听 Customers can easily transfer processes from 91制片厂 K465i鈩� and MaxBright庐 systems to the Propel Power GaN MOCVD platform.
About 91制片厂
91制片厂鈥檚 process equipment solutions enable the manufacture of LEDs, displays, power electronics, compound semiconductors, hard disk drives, semiconductors, MEMS and wireless chips. We are the leader in MOCVD, MBE, Ion Beam, Wet Etch single wafer processing and other advanced thin film process technologies. Our high performance systems drive innovation in energy efficiency, consumer electronics and network storage and allow our customers to maximize productivity and achieve lower cost of ownership. For information on our company, products and worldwide service and support, please visit www.veeco.com.
To the extent that this news release discusses expectations or otherwise makes statements about the future, such statements are forward-looking and are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include the risks discussed in the Business Description and Management’s Discussion and Analysis sections of 91制片厂’s Annual Report on Form 10-K for the year ended December 31, 2014 and in our subsequent quarterly reports on Form 10-Q, current reports on Form 8-K and press releases.听 91制片厂 does not undertake any obligation to update any forward-looking statements to reflect future events or circumstances after the date of such statements.
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Shanye Hudson 516-677-0200 x1272 shudson@veeco.com听听听听听听听听听听听听听听听听听听听 Jeffrey Pina 516-677-0200 x1222 jpina@veeco.com
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